FACILITIES
Multi-material Cluster Tool
Cluster tool with a IR-laser heater and double-differentially pumped, high-pressure RHEED PLD growth system (Neocera) which is connected via vacuum transfer line to an ultra-high vacuum sputtering deposition system for in situ deposition of complex-oxide and metal films (Kurt J. Lesker)
RHEED-assisted Pulsed Laser Deposition
TSST multi-target PLD system with double differentially pumped, high-pressure RHEED growth
Multi-material Cluster Tool
AJA cluster tool with a double-differentially pumped, high-pressure RHEED PLD growth system which is connected via vacuum transfer line to an ultra-high vacuum sputtering deposition system for in situ deposition of complex-oxide and metal films
Layer-by-layer Growth and Chemistry System
Custom-built, double-differentially pumped, high-pressure RHEED growth system with time-of-flight ion-scattering and recoil spectroscopy (TOF-ISARS) for in situ surface chemistry characterization
Pulsed-Laser Deposition Clusters
The laboratory is constructed around laser/chamber clusters to maximize access to a range of materials in a rapid and agile fashion
Pulsed-Laser Deposition Systems
Seven standard PLD chambers with multi-target carousels capable of handling up to 6 targets and including computer-controlled interfaces for automated growth
Excimer Lasers
Coherent LPX 305 (2)
Coherent COMPex
Coherent LeXtra
Metal Sputtering
Custom-built, six-target, ultra-high vacuum metal sputtering chamber with load lock
Chemical Hoods
Range of chemical hoods for various materials fabrication and processing activities
X-ray Diffractometers
Panalytical X’Pert MRD Pro 4-circle diffractometers (2) optimized for complex-oxide thin film characterization
Atomic Force Microscopes (2)
Two (2) Asylum Research MFP-3D capable of AFM, PFM, c-AFM, MFM studies at voltages up to 100 V and temperatures up to 300°C
Atomic Force Microscopy
Digital Instruments MultiMode systems (2) capable of AFM, PFM, c-AFM, MFM
Physical Property Measurement System
Quantum Design PPMS capable of operation at 4-400 K and 0-5 Tesla
SQUID Magnetometer
Quantum Design Magnetic Property Measurement System (MPMS) capable of operation at 4-400K and 0-5 Tesla
Cryogen-free Physical Property Measurement System
Coming soon…Cryogenics 14T cryogen-free with additional resistivity, motorized rotation, and electronics setups
Vacuum Probe Station
LakeShore vacuum, temperature-dependent (4-600 K) probe station for measurement of dielectric, pyroelectric, ferroelectric, electronic, etc. properties of thin films samples
Compound Microscope Probe Stations
Signatone probe stations (2) capable of measurement of dielectric, pyroelectric, ferroelectric, electronic, etc. properties of thin films samples from 300-850 K
Scanning Electron Microscope
Jeol Model XXX microscope with EDS and WDX capabilities
High-Temperature Furnaces
Various furnaces (2) capable of operation up to 1300°C in a range of control environments
Wedge Wire Bonder
West Bond 5400B, compatible with aluminum and gold wire
Impedance Spectroscopy System
Potentiostat/Galvanostat: PARSTAT 3000
The instrument is suitable for electrochemical and impedance spectroscopy studies with a frequency range of 7 MHz to 10 uHz. Physical electrochemistry applications also benefit from using this input to capture pH measurements, temperature, or pressure by means of an external probe. The measurement setup together with the tube furnace enables electrochemical studies at varied temperature and atmospheric gas environment.
Platinum Sputtering System
Marvel Nanofabrication Laboratory
State-of-the-art nano-fabrication facility including >15,000 sq. ft. of Class100/1000 cleanroom and associated hardware
Ion Beam Analysis Laboratory
National Electrostatics Corp. model 5SDH pelletron tandem accelerator this facility offers a complete suite of capabilities, including Rutherford backscattering, for rapid thin-film analysis utilizing an energetic ion beam
Molecular Foundry
Nanoscience research user facility that provides access to cutting-edge expertise and instrumentation in a collaborative, multidisciplinary environment
National Center for Electron Microscopy (NCEM)
Features cutting-edge instrumentation, techniques, and expertise required for exceptionally high-resolution imaging and analytical characterization of a broad array of materials
Advanced Light Source
Synchrotron facility that provides access to the brightest beams of soft X-rays, together with hard X-rays and infrared, for scientific research and technology development
Beamline 4.0.2 – Magnetic Spectroscopy and Scattering
Beamline 6.3.1 – Magnetic Spectroscopy/Materials Science
Beamline 11.0.1 – PEEM3
SYNTHESIS
CHARACTERIZATION
SHARED FACILITIES